Electronegative inductively coupled plasma

Model ID: 12601


Electronegative plasmas exhibit different characteristics than electropositive discharges due to the presence of negative ions. This model simulates an inductively coupled plasma for a mixture of Argon (30%) and Oxygen (70%). The plasma chemistry consists of 62 reactions and 15 species. The negative ions are held in the core of the plasma because they cannot escape the ambipolar field.

This model was built using the following:

Plasma Module