MEMS Structure for Energy Harvesting

S. Rabbani, P.K. Rathore, G. Ghosh, and B.S. Panwar
Indian Institute of Technology Delhi, New Delhi, India

In this paper, a piezoelectric cantilever is investigated using finite element analysis made possible by COMSOL Multiphysics for the generation of electrical energy. A micro power generator was designed to convert mechanical vibrations present in the environment to electrical power. The model was studied for different cantilever dimensions. The load resistor was optimized for obtaining maximum output power for a cantilever length of 2000µm. The load was introduced to the FEM design through PSPICE netlist. The amplitude of vibration for different frequencies has been analyzed through frequency response analysis. The results confirm the possibility of PZT microcantilever power generator for wireless sensor applications. A CMOS compatible fabrication process flow is also suggested.