H. S. Shriram, T. Nimje, D. Vakharia
BITS Pilani, Rajasthan, India
Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the moving parts. It can have electrostatic or electrothermal actuators depending on the functional complexity and ...
A. Ricci and E. Giuri
Materials and Microsystems Laboratory (CHI-Lab), Politecnico di Torino, Torino, Italy
Cantilever vibration in fluid environment is probably one of the most common Fluid Structure Interaction problems in the field of Micro/Nano Electro Mechanical Systems. Usually the effect of fluid on cantilever oscillation is characterized in terms of mode resonance frequencies and quality factors (Qs). In this work a new approach to the above FSI problem is proposed: modes Q factors and ...
M. Guizzetti, V. Ferrari, D. Marioli, and T. Zawada
Dept. of Electronics for Automation, University of Brescia, Brescia, Italy
Meggitt, Ferroperm Piezoceramics A/S, Kvistgaard, Denmark
The conversion of mechanical energy from environmental vibrations into electrical energy is a key point for powering sensor nodes toward the development of autonomous sensor systems. Piezoelectric energy converters realized in a cantilever configuration are the most studied for this purpose. In order to improve the performances of the converter, the geometry has to be properly designed. In this ...
V. Mathur, J. Li, and W.D. Goodhue
Photonics Center, Department of Physics and Applied Physics, University of Massachusetts, Lowell
In this work a micro-cantilever optical-MEMS sensor based on the AlGaAs system is designed and modeled. The device consists of two micro-cantilever beams perfectly aligned with the free ends separated by approximately 200 nm up to 2000 nm. The finite element method (FEM) (COMSOL Multiphysics) has been employed here to model the structural deformation and light propagation through the device. ...
H. Neubert1, A. Kamusella1, and T. Q. Pham2
1Institute of Electromechanical and Electronic Design, Technische Universität Dresden, Dresden, Germany
2OptiY e.K., Aschaffenburg, Germany
The optimization of design parameters with regard to tolerances is an important reason for design processing. We used a COMSOL Multiphysics structural mechanics model with the OptiY tool for finding an optimized design of a thick film accelerometer conforming to our sensitivity and cross sensitivity requirements, including resonance frequency. We calculated the probability of a system failure due ...
S. Aoyagi1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA
A new type of accelerometer is demonstrated which consists of a dielectric seismic mass and a comb-shaped planar capacitor underneath it. The simple structure of the device allows the use of polymer Parylene as the proof mass, so the technology is greatly simplified and only surface micromachining is required. The measuring principle is detecting capacitance change according to the dielectric ...
F. Wittbrach, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Bielefeld University, Germany
It is possible to control the motion of magnetic beads using a combination of hydrodynamic and electromagnetic forces. In this work, we investigate the possibility to manipulate the motion of beads with different magnetic moments in a special microfluidic structure so as to separate them. We also experimentally prove that this structure is a suitable device to separate beads and show that ...
Optimization of Design Parameters of a Novel MEMS Strain Sensor used for Structural Health Monitoring of Highway Bridges
H. Saboonchi, and D. Ozevin
Civil Engineering Department
University of Illinois at Chicago
The novel Micro Electro Mechanical System (MEMS) based Piezoresistive stain sensor is presented in this paper. The main goal of this sensor is to monitor the localized strain in the highway bridges especially near the crack tips. Monitoring the crack growth on the bridges can lead to early detection and prevention of bridge failures. The COMSOL Multiphysics software was used to optimize the ...
Evaluation of Tensile Modulus of Carbon Nanotube Bundle Based Composite with Interface Using Finite Element Method
M. S. Islam, F. O. Riktan, S. C. Chowdhury, M. M. R. Chowdhury, and S. Ahmed
Bangladesh University of Engineering & Technology (BUET)
Carbon Nanotubes (CNTs) have remarkable mechanical, thermal and electrical properties. The properties of CNTs depend on atomic arrangement (how the sheets of graphite are rolled), the diameter and length of the tubes and morphology of nanostructure. In this paper effective elastic properties of CNT based polymer composites are evaluated using a square Representative Volume Element (RVE) in ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Taiwan, (R.O.C)
National Tsing Hua University, Taiwan, (R.O.C)
Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on ...