H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA
In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...
Evaluation of electric impedance spectra for single bio-cells in microfluidic devices using combined FEMLAB/ELDO modeling
Senez, V., Arscott, S.
This paper describes a simple method to predict the electrical impedance spectrum of single and cultured cells in micro-devices. It can be used for the rapid design of micro-sensors as well as for more fundamental studies about the interactions of electric fields with bio-cells. The finite element (FEMLAB) and the transport lattice (ELDO) methods are coupled through the MATLAB environment for ...
N. Qudus, T. Mahbub, S. A. Ali, and M. Shajahan
 Bangladesh University of Engineering and Technology, Dhaka Bangladesh
A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. The model uses coupled Laplace and Poisson-Boltzmann to evaluate the electric potential distribution inside the channel. It also contains continuity and Navier–Stokes equations for the solution of fluid flow. A particle trajectory model was ...
Berthier, J., Chatelain, F.
Polymerase chain reaction is the most usual way to amplify DNA strands for detection and biorecognition. However efficient biorecognition requires to perform many different PCRs at the same time. We present here a new concept of simultaneous PCRs in capillary tubes and more specifically the dimensioning of such a microsystem. The concept consists in performing different PCRs in annular rings ...
Koser, H., Kaya, T., Mao, L.
Department of Electrical Engineering, Yale University, New Haven, CT
We have developed a novel, multilayered microfluidic chamber that enables the realtime quantitative study of chemotaxis on virtually all types of motile cells. In this paper, we present a FEMLAB modeling study of the 3D chamber design, including a consideration of each device iteration that successively led to the eventual design. The final chamber design is able to create and maintain an ...
Optimization of the Temperature Distribution in a Chemical Microreactor using a Multi-Segment Integrated Thin Film Heater
T.R. Henriksen, S. Jensen, U. Quaade, and O. Hansen
Technical University of Denmark
COMSOL Multiphysics has been used to study the effect of different heater design parameters on the temperature distribution in a chemical microreactor. The primary objective of the simulations has been to optimize the temperature uniformity inside the reaction chamber. In the simulations, special attention has been given to how the number, positions and widths of the heater strips relate ...
Perspectives of Thermo-electro-mechanical Micro Actuators for Micro Switch Applications: Design and Simulation
M. Matmat, M. Al Ahmad, and J. Y. Fourniols
Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS), Toulouse, France
In this work, thermo-mechanical simulations employing a 3D finite element analysis (FEA) of a current driven V-shaped actuator is presented. The structure's hot arms consist of polysilicon, which was used as the active material for deflection due to the Joule effect.COMSOL Multiphysics with stationary and parametric solvers was used to calculate the resulting deflection when current is applied. ...
K. Suresh, B.V.M.P.S. Kumar, U.V. Kumar, M. Umapathy, and G. Uma
National Institute of Technology Tiruchirapalli, Tamil Nadu, India
A proximity DC current sensor using of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end is designed and simulated in COMSOL Multiphysics. The change in resonant frequency of cantilever is a measure of the current through the wire. The sensor is found to be linear with good sensitivity.
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...